Microlithography, molecular imprinting
1. J.D. Marty, M. Mauzac: Molecular Imprinting: State of the Art and Perspectives.- 2. H. Ito: Chemical Amplification Resists for Microlithography
- Location
-
Deutsche Nationalbibliothek Frankfurt am Main
- ISBN
-
9783540218623
3540218629
- Dimensions
-
24 cm
- Extent
-
VI, 276 S.
- Language
-
Englisch
- Notes
-
Ill., graph. Darst.
Literaturverz. S. 223 - 245
- Bibliographic citation
-
Advances in polymer science ; Vol. 172
- Classification
-
Ingenieurwissenschaften und Maschinenbau
- Keyword
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Lithografie
Photoresist
Molekulares Prägen
- Event
-
Veröffentlichung
- (where)
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Berlin, Heidelberg, New York
- (who)
-
Springer
- (when)
-
2005
- Contributor
- Table of contents
- Rights
-
Bei diesem Objekt liegt nur das Inhaltsverzeichnis digital vor. Der Zugriff darauf ist unbeschränkt möglich.
- Last update
-
11.03.2025, 12:01 PM CET
Data provider
This object is provided by:
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Associated
- Itō, Hiroshi
- Springer
Time of origin
- 2005
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