Monografie
Exploring Electron Beam Induced Surface Activation for the Fabrication of well-defined Nanostructures: On the Role of Catalytic Processes, Substrates and Precursors.
- Sprache
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Englisch
- Anmerkungen
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Erlangen, Friedrich-Alexander-Universität Erlangen-Nürnberg (FAU), Diss., 2014
- Identifier
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107547910X
Thema
Elektronenstrahl; Elektronenstrahllithographie; Nanolithographie; Nanotechnologie; Metallcarbonyle; Hochschulschrift
Beteiligte Personen und Organisationen
- URN
- Rechteinformation
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Letzte Aktualisierung
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26.01.2023, 13:57 MEZ
Objekttyp
- Monografie
Beteiligte
- Vollnhals, Florian
- Marbach, Hubertus
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