On the chemical composition of TiAlN thin films : Comparison of ion beam analysis and laser-assisted atom probe tomography with varying laser pulse energy
- Sprache
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Englisch
- Identifier
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1221097962
Beteiligte Personen und Organisationen
- DOI
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10.18154/RWTH-2019-08307
- URN
- Rechteinformation
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Letzte Aktualisierung
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26.01.2023, 13:52 MEZ
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